Maluf, Nadim I. : rechercher sur Z-Library

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1

Fabrication of SOI wafers with buried cavities using silicon fusion bonding and electrochemical etchback

J. Mark Noworolski, Erno Klaassen, John Logan, Kurt Petersen, Nadim I. Maluf

Journal:

Sensors and Actuators A: Physical

Année:

1996

Langue:

english

Fichier:

PDF, 377 KB

english, 1996

2

Packaging a piezoresistive pressure sensor to measure low absolute pressures over a wide sub-zero temperature range

J.Kurth Reynolds, David Catling, Randel C Blue, Nadim I Maluf, Thomas Kenny

Journal:

Sensors and Actuators A: Physical

Année:

2000

Langue:

english

Fichier:

PDF, 741 KB

english, 2000

3

Miniature spectrometers for biochemical analysis

Gaylin M Yee, Nadim I Maluf, Paul A Hing, Michael Albin, Gregory T.A Kovacs

Journal:

Sensors and Actuators A: Physical

Année:

1997

Langue:

english

Fichier:

PDF, 559 KB

english, 1997

4

Characterizing deflectable microstructures via a high-resolution laser-based measurement system

Kenneth A. Honer, Nadim I. Maluf, Edwardo Martinez, Gregory T.A. Kovacs

Journal:

Sensors and Actuators A: Physical

Année:

1996

Langue:

english

Fichier:

PDF, 589 KB

english, 1996

5

Silicon fusion bonding and deep reactive ion etching: a new technology for microstructures

Erno H. Klaassen, Kurt Petersen, J.Mark Noworolski, John Logan, Nadim I. Maluf, Joe Brown, Christopher Storment, Wendell McCulley, Gregory T.A. Kovacs

Journal:

Sensors and Actuators A: Physical

Année:

1996

Langue:

english

Fichier:

PDF, 1.25 MB

english, 1996

6

Process for in-plane and out-of-plane single-crystal-silicon thermal microactuators

J. Mark Noworolski, Erno H. Klaassen, John R. Logan, Kurt E. Petersen, Nadim I. Maluf

Journal:

Sensors and Actuators A: Physical

Année:

1996

Langue:

english

Fichier:

PDF, 477 KB

english, 1996

7

Plasma-etched neural probes

David T Kewley, Matthew D Hills, David A Borkholder, Ion E Opris, Nadim I Maluf, Christopher W Storment, James M Bower, Gregory T.A Kovacs

Journal:

Sensors and Actuators A: Physical

Année:

1997

Langue:

english

Fichier:

PDF, 775 KB

english, 1997

8

Quantum lithography

Maluf, Nadim I.

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Année:

1991

Langue:

english

Fichier:

PDF, 947 KB

english, 1991

9

An Introduction to Microelectromechanical Systems Engineering

Journal:

Measurement Science and Technology

Année:

2002

Langue:

english

Fichier:

PDF, 1.97 MB

english, 2002

10

Distortion measurement of embedded absorber (silicon membrane) and conventional (diamond membrane) x-ray masks

Maluf, Nadim I.

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Année:

1990

Langue:

english

Fichier:

PDF, 750 KB

english, 1990

11

SPIE Proceedings [SPIE 10th Annual Symposium on Microlithography - Sunnyvale, CA (Wednesday 26 September 1990)] 10th Annual Symp on Microlithography - Sophisticated masks

Pease, Roger Fabian W., Owen, Gerry, Browning, Raymond, Hsieh, Robert L., Lee, Julienne Y., Maluf, Nadim I., Berglund, C. Neil, Wiley, James N.

Année:

1991

Langue:

english

Fichier:

PDF, 470 KB

english, 1991

12

SPIE Proceedings [SPIE 11th Annual BACUS Symposium on Photomask Technology - Sunnyvale, United States (Wednesday 25 September 1991)] 11th Annual BACUS Symposium on Photomask Technology - Reflective masks for 1X deep ultraviolet lithography

Hsieh, Robert L., Lee, Julienne Y., Maluf, Nadim I., Browning, Raymond, Jerabek, Paul, Pease, Roger Fabian W., Owen, Gerry, McGinnis, Kevin C.

Année:

1992

Langue:

english

Fichier:

PDF, 1.41 MB

english, 1992

13

SPIE Proceedings [SPIE Photomask Technology - Sunnyville, CA (Wednesday 23 September 1992)] 12th Annual BACUS Symposium on Photomask Technology and Management - Rational argument for the impracticability of 1× reticles

Owen, Gerry, Pease, Roger Fabian W., Maluf, Nadim I., Hsieh, Robert L., Ye, Jun, Berglund, C. Neil, Landstrom, Scott, LaFrance, Richard

Année:

1993

Langue:

english

Fichier:

PDF, 278 KB

english, 1993

14

SPIE Proceedings [SPIE SPIE'S 1993 Symposium on Microlithography - San Jose, CA (Sunday 28 February 1993)] Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing III - Optimization of low-voltage electron optics

Hordon, Laurence S., Huang, Zhirong, Browning, Raymond, Maluf, Nadim I., Pease, Roger Fabian W., Patterson, David O.

Année:

1993

Langue:

english

Fichier:

PDF, 455 KB

english, 1993

15

SPIE Proceedings [SPIE Microlithography '90, 4-9 Mar, San Jose - San Jose, CA (Sunday 4 March 1990)] Electron-Beam, X-Ray, and Ion-Beam Technology: Submicrometer Lithographies IX - Modeling of thermal stresses and distortions in x-ray masks employing the embedded absorber structure

Maluf, Nadim I., Chou, Stephen Y., Pease, Roger Fabian W., Resnick, Douglas J.

Année:

1990

Langue:

english

Fichier:

PDF, 473 KB

english, 1990

16

SPIE Proceedings [SPIE BiOS '97, Part of Photonics West - San Jose, CA (Saturday 8 February 1997)] Micro- and Nanofabricated Electro-Optical Mechanical Systems for Biomedical and Environmental Applications - Miniature spectrometers for biochemical analysis

Yee, Gaylin M., Maluf, Nadim I., Hing, Paul A., Albin, Michael, Kovacs, Gregory T. A., Gourley, Paul L.

Année:

1997

Langue:

english

Fichier:

PDF, 424 KB

english, 1997